Gas cabinets

◆ Related functions:

1, automatic switch of double bottles, continuous uninterrupted gas supply to process equipment;

2, equipped with metal shell, air extraction, detection sensor, etc., to ensure the complete operation of equipment;

Safety considerations for process equipment

Safety considerations for operators

Environmental safety considerations

Safety considerations for process equipment

3, pressure adjustment, reduce the process gas pressure from the cylinder pressure to the required pressure process, stable pressure, stable flow;

4, gas purification replacement (high purity nitrogen purge + vacuum).

◆ Conveying medium:

SiH4, PH3, B2H6, H2, HBr, Cl2 and other flammable/explosive/toxic/corrosive gas media.

◆ Configuration description:

Smoke Sensor, high temperature sensor, flame detector, heating system, two-stage voltage regulator, EFS, etc.